History
The EBPG has a long history, stretching back to the 1960s. This particular e-beam system was first built by Philips (in the Netherlands), then was bought out by Cambridge Instruments (UK), which morphed into Leica Lithography, spun off as Vistec (and moved to the US), and now finally acquired by Raith (Germany). The EBPG is currently built in the Netherlands, where it began long ago. Throughout all this turmoil the EBPG has survived mostly due to customer loyalty and the commitment of a few key people in manufacturing and support.
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The first question is always “how small”, and the answer is about 10 nm if you work at it.
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Lovely. But this is just thin resist, not a device.
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People have written smaller features, using scanning electron microscopes (SEMs) converted for beam writing. So why not use a converted SEM instead of the big, fancy EBPG? Let’s consider that question.
