Device Example: a transistor

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As an example, let’s consider the design of a field-effect transistor (FET). If you don’t know how a FET works, then pay close attention, because you don’t want to look like an idiot after getting out of graduate school. When the gate is charged positively, electrons are attracted toward it. These electrons change the region under the gate into a conductor, allowing current to pass from (let’s say) the left wire to the right. Or right to left - whatever. When the gate is not charged then the electrons under the gate dissipate and the transistor turns off. This is a typical device to build with electron-beam lithography, and it makes a nice example of how to organize your computer-aided design (CAD).

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Transistor Page 2

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The various parts of a transistor are built up using a number of lithography steps, as shown above. Each step in the fabrication sequence is called a “layer” in the CAD program.

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Transistor Page 3

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Here is the result of one layer of the design: the silicon has been patterned into an island (or “mesa”) to isolate it from other transistors.

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Transistor Page 4

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Subsequent layers in the fabrication process follow, each including resist coating, exposure, development, and pattern transfer. 

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