EBPG hardware tour Page 2

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There are three major lenses. The topmost is an electrostatic lens on the electron gun. The second is a magnetic lens which forms a crossover of the beam inside the blanker. The blanker uses an electric field to turn the beam on and off, and because it sits at a beam crossover, there is no image shift when the beam is blanked. The third lens focuses the beam to a spot on the substrate.

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