Machine Use Rates

 

Rates in US$/hour unless otherwise noted

  Yale Academic External Academic Industrial      
SEM, Hitachi 37 61 215
AFM, Bruker 35 58 105
e-beam, EBPG 100 165 300
TEM, FEI Osiris 100 165 300
Ion mill, Fischione  37 61 111
Ion mill, Hitachi 37 61 111
Gold sputtering 20 32 76
Iridium sputtering 20 32 76
Microtome, Leica 30 50 90
HSQ resist, 4 ml 25 ea 41 ea 75 ea
CSAR resist, 4 ml 20 ea 33 ea 60 ea
Dektak profilometer 10 16 45