E-beam parameters Page 4

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What do we mean by “area”? If you plug in the area of your pattern, then the calculated time will be the total exposure time. If you plug in the area for one pixel then the time will be the “dwell time” for one pixel. The dwell time is the inverse of the clock frequency. The highest clock frequency is 50 MHz. This constrains the exposure current and the beam stepping distance. 

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