Manuals & Documentation

Manuals (access from Yale only)

FEI Osirus TEM manual

Vistec EBPG electron-beam lithography system manuals

Beamer Manual

Cheat Sheets

Hitachi SU70 SEM cheat sheet

TEM cheat sheet (v4)

EBPG cheat sheet

E-beam data preparation (with Beamer) cheat sheet

Flat polishing cheat sheet

Electron-beam lithography training material

Electron-Beam Lithography Training

Living With E-beam Drift, part 1    part 2     part 3

Electron-Beam Linux Server, getting started   (access from Yale only)

Layout CAD Tutorial

Beamer Tutorial

Proximity Effect Correction: here are those PSF files you need

Cjob Tutorial


Un. Minnesota EBPG Wiki    

Storing HSQ in liquid nitrogen

Development of PMMA in IPA/water

Conducting layer for HSQ resist

[The EBPG calculator previously found here is now available as a program you can download and run locally. The calculator has been rewritten in Python, due to the failure of Oracle to maintain backward compatibility in Java. Look for the EBPG calculator on our download page. The EBPG calculator can also be found on sizzlorr desktops.]