Downloads


EBPG FUN PAK! 

Do you have a clever ebpg script or utility?

You can add it to the fun pak!  

Name System Description Download Link
EBPG Fun Pak EBPG, Linux

All sorts of EBPG goodies, including set_current, gpfsort, gpfmerge, calc.py, align_window, find_edge, find_square, and more. Check out the presentation on drift and sorting for examples of gpfsort in action. Now contains piece-part fixture designs. Gpfsort can now sort fields by a specified path. Ybrsort can now sort shapes by a specified path.

Dot Noise Linux, generic

Analyze e-beam deflection noise using images of dots

EBPG parameter calculator Linux, generic*

Calculate EBPG exposure parameters

Flatten GDS v3.0 Linux, generic

Flatten GDSII pattern files, removing hierarchy and rendering rotations, scaling, etc, as simple polygons. Multiple inceptions of rotated and scaled cells are now handled properly.

GDS Dump Linux, generic

Print contents of a GDSII pattern file as text, which is useful for debugging CAD problems.

GDS Library Linux, generic

A library of C functions for reading and writing GDSII pattern format. Example included.

Line Edge Roughness Linux, generic

Analyze line edge roughness using images of lines

Set Current Linux, EBPG

Set any current between 0.5 and 200 nA, and adjust lens 2 for optimal conjugate blanking. Installation instructions

TIFF to GDS Linux, generic

Convert TIFF images into GDSII format, e.g. for e-beam exposure (version 2)

Bruker AFM Analysis Windows

Bruker’s AFM NanoScope Analysis, for Yale AFM users only. Others, please contact Bruker directly.

Download NanoScope Analysis from Yale Box

Please Note:

*This Python program will run on a Mac if you first install the GTK library. The calculator will also run on a Windows PC running Cygwin - be sure to include Python while installing Cygwin. 

Installation

To unpack downloaded files that end in “.tar”, use the command 

tar xvf filename.tar 

To unpack downloaded files that end in “.tar.gz” or “.tgz” use the command 

tar xvzf filename.tar.gz 

To unpack files that end in “.zip”… If you need help with this then you really should not be attempting e-beam lithography. Go home and take a nap. 

Look in the file INSTALL or install.txt for further instructions. 
 

These programs are open-source and are dependent on other open-source code. They will run on nearly any distribution of GNU/Linux and are distributed here under the GNU general public license.


For more background and tips on using the noise analysis program, 

click here for the presentation in PDF format (31 MB), 

or 

click here for the PowerPoint file (31 MB).