Two Hitachi SU-70 scanning electron microscopes provide 1 nm resolution with a high-brightness electron source. Both SEM instruments accelerate electrons from 0.5 to 30 kV, and are equipped with an energy filtered BSE detector above the objective lens. One of the microscopes (“R2D2”) has an energy dispersive x-ray detector for elemental analysis, while the other (“C3PO”) is equipped with a solid-state backscatter detector for enhanced imaging of grain boundaries. Dual objective magnets allow the user to switch between field-immersion and non-field modes.
|Accel. voltage||0 to 30 kV|
|Resolution @30kV||1 nm|
|Max sample size||10cm dia. x 1cm high|