Speaker:
Daniel Prober
Seminar Date:
Friday, February 19, 2016 - 7:00am
Location:
Engineering Student Center - Dunham
Hillhouse Av
New Haven, CT
In the early 1970s, the first clean room at Yale was opened, having modest capabilities. The evolution to
producing some of the world’s smallest and best nanocircuits is a story of invention, luck and some savvy
investment by Yale and funding agencies. The world’s smallest wires (at that time) were first produced at
Yale in 1978 for transport studies, with widths as small as 20 nm. But, these were produced with optical
lithography methods, which are reputed to have a resolution only 10-20x larger. Michael Rooks and
colleagues, in the mid-1980s developed the first electron-beam writing system at Yale, and since then those
students and researchers, and subsequent ones, have done marvelous things. We describe these early and
later developments.
Host:
Eric Altman
Seminar Announcement Brochure: