The beam step size is the effective pixel size, even if the beam spot is larger or smaller than this number. Use the beam step size when calculating the dose delivered to one pixel. The beam step size is always a multiple of the least significant bit of the deflector DAC. If you don’t know what a digital-to-analog converter (DAC) is, then look it up. One bit on the EBPG’s DAC deflects the beam 1 nm. We have a 20 bit DAC, so… WHAT IS THE MAXIMUM DEFLECTION?