Switching the marker when you have calibration problems
When calibrating the field deflection with "aeb" or
pg adjust ebpg
we sometimes find that pull-in compensation exceeds the limit, even after several iterations. The error message looks like this:
| defl = 522.060000,522.060000 |
| pi (x,y) = 3.481_um, 0.000_um err = -26.8_nm, 16.8_nm |
| pi (x,y) = -3.481_um, -0.000_um err = -25.4_nm, 11.8_nm |
| pi (x,y) = -0.000_um, 3.481_um err = -26.6_nm, 8.2_nm |
| pi (x,y) = 0.000_um, -3.481_um err = -27.3_nm, 11.6_nm |
| PICOM = 2.0_nm, measured = 3.6_nm |
| %ENG_E_NOOPRE - the optima for the fine focus, |
| diagonal and axis stigmators are not reproducible |
This error might be caused by a dirty marker. You can switch to a new marker, temporarily, by centering a new mark in SEM mode, then using the command
usethismark
This command is a little script that runs these two commands:
| mvm 0,0 --rel p20 |
| pg marker calib `pg get tab` p20 |
After switching marks, try "aeb" again. If this fixes the problem, then we should update the marker coordinate in the holder table, so that the new mark will be used by the next users. You should ask the system administrator to update the holder table.