Manuals & Documentation


Manuals (access from Yale only)

FEI Osirus TEM manual

Raith EBPG electron-beam lithography system manuals

Beamer Manual


Cheat Sheets

Hitachi SU70 SEM 

FEI Osris TEM (v4)

EBPG 

Bruker Fastscan 

Flat polishing 


Electron-beam lithography training material

EBPG training is now an online Yale Canvas course. Please contact the YINQE staff for an invitation to enroll. In case you would like to see the course material without enrolling, here are the presentations. Feel free to plagiarize with impunity. No permissions or citations are required.

Introduction

Choosing parameters

EBPG hardware

Alignment

Layout CAD tutorial

Getting the least from your e-beam

Optional: Beamer tutorial

Optional: Cjob tutorial

More useful information about electron-beam lithography:

Living With E-beam Drift

Proximity Effect Correction: here are those PSF files you need


Miscellaneous

Un. Minnesota EBPG Wiki    

Storing HSQ in liquid nitrogen

Development of PMMA in IPA/water

Conducting layer for HSQ resist


[The EBPG calculator previously found here is now available as a program you can download and run locally.  Look for the EBPG calculator on our download page. The EBPG calculator can also be found on chickenfoot desktops.]