Manuals (access from Yale only)
Raith EBPG electron-beam lithography system manuals
Cheat Sheets
Electron-beam lithography training material
EBPG training is now an online Yale Canvas course. Please contact the YINQE staff for an invitation to enroll. In case you would like to see the course material without enrolling, here are the presentations. Feel free to plagiarize with impunity. No permissions or citations are required.
Getting the least from your e-beam
More useful information about electron-beam lithography:
Proximity Effect Correction: here are those PSF files you need
Miscellaneous
Storing HSQ in liquid nitrogen
Development of PMMA in IPA/water
Conducting layer for HSQ resist
[The EBPG calculator previously found here is now available as a program you can download and run locally. Look for the EBPG calculator on our download page. The EBPG calculator can also be found on chickenfoot desktops.]