Electron-beam lithography training material
EBPG training is now an online Yale Canvas course. Please contact the YINQE staff for an invitation to enroll. In case you would like to see the course material without enrolling, here are the presentations. Feel free to plagiarize with impunity. No permissions or citations are required.
More useful information about electron-beam lithography:
[The EBPG calculator previously found here is now available as a program you can download and run locally. Look for the EBPG calculator on our download page. The EBPG calculator can also be found on chickenfoot desktops.]