E-beam Resist Processes
Development of PMMA in ethanol/water, aka “Development characteristics of polymethyl methacrylate in alcohol/water mixtures: a lithography and Raman spectroscopy study,” L.E. Ocola, M. Costales, D.J. Gosztola, Nanotechnology, Volume 27, Number 3
Electron-beam lithography training material
EBPG training is now an online Yale Canvas course. Please contact the YINQE staff for an invitation to enroll. In case you would like to see the course material without enrolling, here are the presentations. Feel free to plagiarize with impunity. No permissions or citations are required.
Beamer 4.2.0 tutorial (used on the ebpg-5000)
Beamer 6.1.1 tutorial (used on the ebpg-5200)
E-beam Tips and Tricks
Caltech EBPG (Note that some procedures described here are not allowed at Yale. Be sure to ask permission before trying anything new.)