Electron-beam lithography training material
EBPG training is now an online Yale Canvas course. Please contact the YINQE staff for an invitation to enroll. In case you would like to see the course material without enrolling, here are the presentations. Feel free to plagiarize with impunity. No permissions or citations are required.
Beamer 4.2.0 tutorial (used on the ebpg-5000)
Beamer 6.1.1 tutorial (used on the ebpg-5200)
Caltech EBPG (Note that some procedures described here are not allowed at Yale. Be sure to ask permission before trying anything new.)