Downloads
| Name | System | Description | Download Link |
|---|---|---|---|
| EBPG Fun Pak | EBPG, Linux |
All sorts of EBPG goodies, including an installation script for gpfun, weekly_check, gpfsort, gpfmerge, calc.py, align_window, find_edge, find_square, set_current, and more. NEW: gpfun for generating weird gpf, and a dose_matrix program for creation of dose tests. Check out the presentation on drift and sorting for examples of gpfsort in action. Gpfsort and ybrsort can now sort fields by a specified path. Correlate.py provides a well-documented method for using correlation alignment. |
|
| Flatten GDS v3.13 | Linux, generic |
Flatten GDSII pattern files, removing hierarchy and rendering rotations, scaling, etc, as simple polygons. Rotated, scaled, and mirrored cells are now handled properly. A python script for flattening with Layout is included, for pathological cases. |
 flatten_3.13.tar |
| GDS Dump | Linux, generic |
Print contents of a GDSII pattern file as text, which is useful for debugging CAD problems. |
gdsdump_2.tar |
| GDS Library | Linux, generic |
A library of C functions for reading and writing GDSII pattern format. Example included. |
libgds2.7.tar |
| Freebeam - convert patterns to EBPG format | Linux |
Freebeam: Pattern fracturing and conversion to GPF for EBPG systems. The download includes all source code for Linux systems. Easiest installation is on an EBPG console. Click here for more information and for the github download link. |
|
| gpfun - fun with gpf | Linux RHEL-7,8 |
Generate Raith GPF and GTX (text) format pattern files with all the latest pattern primitives. This application provides simple menus to define circles, ellipses, pie slices, arcs, rotated rectangles, paths, and polygons. Every obscure feature of GPF is available here. Generate entire arrays of shapes to fill an exposure field, with automatic partitioning of main-field and sub-field arrays. Merge these GPF files with pattern files from Beamer or Freebeam using a graphical menu. This app is most easily installed on an EBPG console, since it requires gpfgtx, gtxgpf, and cview. Click here to download the installation script from github. Download this small installation script to Linux (RHEL-7 or RHEL-8). Unzip the file install_gpfun.sh, use “su” to become the root user, then “cd” to wherever you put it, and then type “source ./install_gpfun.sh” The script will check for required applications then will download and install the appropriate archive from github. |
Installation
To unpack downloaded files that end in “.tar”, use the command
tar xvf filename.tar
To unpack downloaded files that end in “.tar.gz” or “.tgz” use the command
tar xvzf filename.tar.gz
To unpack files that end in “.zip”… If you need help with this then you really should not be attempting e-beam lithography. Go home and take a nap.
Look in the file INSTALL or install.txt for further instructions.
These programs are open-source and are dependent on other open-source code. They will run on nearly any distribution of GNU/Linux and are distributed here under the GNU general public license.