Downloads
| Name | System | Description | Download Link |
|---|---|---|---|
| EBPG Fun Pak | EBPG, Linux |
All sorts of EBPG goodies, including gpfsort, gpfmerge, calc.py, align_window, find_edge, find_square, and more. Now contains htstab, for Vectorbeam expatriates. Check out the presentation on drift and sorting for examples of gpfsort in action. Gpfsort and ybrsort can now sort fields by a specified path. NEW gpf utilities adapt to changes in Beams > v09. NEW PROCEDURE for using user-defined marker scripts. |
 ebpg_funpak_25.tar |
| Dot Noise | Linux, generic |
Analyze e-beam deflection noise using images of dots |
 dotnoise-2.6.tar.gz |
| EBPG parameter calculator | Linux, generic* |
Calculate EBPG exposure parameters |
calc.zip |
| Flatten GDS v3.0 | Linux, generic |
Flatten GDSII pattern files, removing hierarchy and rendering rotations, scaling, etc, as simple polygons. Multiple inceptions of rotated and scaled cells are now handled properly. |
flatten_3.0.tar |
| GDS Dump | Linux, generic |
Print contents of a GDSII pattern file as text, which is useful for debugging CAD problems. |
gdsdump.tar |
| GDS Library | Linux, generic |
A library of C functions for reading and writing GDSII pattern format. Example included. |
libgds2.5.tar |
| Line Edge Roughness | Linux, generic |
Analyze line edge roughness using images of lines |
ler_2.0.tar.gz |
| TIFF to GDS | Linux, generic |
Convert TIFF images into GDSII format, e.g. for e-beam exposure (version 2) |
tif2gds_v2.tar |
| Bruker AFM Analysis | Windows |
Bruker’s AFM NanoScope Analysis, for Yale AFM users only. Others, please contact Bruker directly. |
|
| Please Note: |
*This Python program will run on a Mac if you first install the GTK library. The calculator will also run on a Windows PC running Cygwin - be sure to include Python while installing Cygwin. |
Installation
To unpack downloaded files that end in “.tar”, use the command
tar xvf filename.tar
To unpack downloaded files that end in “.tar.gz” or “.tgz” use the command
tar xvzf filename.tar.gz
To unpack files that end in “.zip”… If you need help with this then you really should not be attempting e-beam lithography. Go home and take a nap.
Look in the file INSTALL or install.txt for further instructions.
These programs are open-source and are dependent on other open-source code. They will run on nearly any distribution of GNU/Linux and are distributed here under the GNU general public license.
For more background and tips on using the noise analysis program,
click here for the presentation in PDF format (31 MB),
or