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Home » Tips and Tricks for ebeam users

Tips and Tricks for ebeam users

 

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Aligning to badly rotated substrates: Breaking the 0.2 degree limit

Aligning to large nitride windows or large marks

Deep holes and trenches in resist aka high aspect-ratio profiles

HSQ resist - essential tips

How to thicken resist

Aligning to low-contrast marks

Using the secondary electron detector 

Correlation alignment for weird marks

Hacking field boundaries to force pattern continuity

Multipass writing: should you really?

Randomizing a pattern to wash away pattern glitches

A few common etch recipes using e-beam resist

Beam current not measured in centre of cup error

Half-micron circles: a lesson about shot placement

Using different beam steps in the same gpf file

A few alignment mark tips

Beam current switching - how to make it more reliable

Conducting layers for e-beam on insulating substrates

Stabilizing the conducting coating over alignment marks on insulating substrates

Dose matrix utility program: set up 1D or 2D dose test

Fix the linux x2go login problem

Switching markers when you have a calibration problem

Linux server access with Windows Subsystem for Linux

Linux server access with Windows Remote Desktop (best)

PC to Linux file transfer

 

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